Lectures Scheduled date

Number	Review Topics	References	Actual Date
Lecture 1	Review on Semiconductor Physics & IC Technology and Advancement	PPT	Jan-2016

Number	UNIT I	References	Actual Date
Lecture 2-15	Introduction To IC Technology: SSI, MSI, LSI, VLSI Integrated Circuits Crystal Growth and Wafer Preparation: Electronic Grade Silicon,Czochralski Crystal Growth, Silicon Shaping,Processing Considerations. Epitaxy: Vapor Phase Epitaxy, Molecular Beam Epitaxy, Silicon on Insulators, Epitaxial Evaluation.	(1) S. M. Sze, "VLSI Technology", 2nd Edition, TMH. (2) S.K. Ghandhi, "VLSI Fabrication Principles", 2nd Edition, Willy-India Pvt.Ltd	Feb-2016

Number	UNIT II Topics covered	References	Actual Date
Lecture 16-26	Oxidation: Growth Kinetics, Thin Oxides, Oxidation Techniques andSystems,Oxides Properties. Lithography: Optical Lithography. Photo masks, Wet Chemical Etching. Dielectric and Polysilicon Film Deposition: Deposition Processes, Polysilicon, Silicon Dioxide, Silicon Nitride.	(1) S. M. Sze, "VLSI Technology", 2nd Edition, TMH. (2) S.K. Ghandhi, "VLSI Fabrication Principles", 2nd Edition, Willy-India Pvt.Ltd	Feb-2016

Number	UNIT III Topics covered	References	Actual Date
Lecture 27-40	Diffusion: Diffusion of Impurities in Silicon and Silicon Dioxide, Diffusion Equations, Diffusion Profiles, Diffusion Furnace, Solid, Liquid and Gaseous Sources, Sheet Resistance and its Measurement. Ion-Implantation: Ion-Implantation Technique, Range Theory, ImplantationEquipment	(1) S. M. Sze, "VLSI Technology", 2nd Edition, TMH. (2) S.K. Ghandhi, "VLSI Fabrication Principles", 2nd Edition, Willy-India Pvt.Ltd	Mar-2016

Number	UNIT IV Topics covered	References	Actual Date
Lecture 41-47	Metallization: Metallization Application, Metallization Choices, PhysicalVapor Deposition, Vacuum Deposition, Sputtering Apparatus Packaging of VLSI devices: Package Types, Packaging Design Consideration VLSI Assembly Technologies, Package FabricationTechnologies.	(1) S. M. Sze, "VLSI Technology", 2nd Edition, TMH. (2) S.K. Ghandhi, "VLSI Fabrication Principles", 2nd Edition, Willy-India Pvt.Ltd	Mar-2016

Number	UNIT V Topics covered	References	Actual Date
Lecture 48-55	VLSI Process Integration: Fundamental Considerations For IC Processing NMOS IC Technology CMOS IC Technology & Bipolar IC Technology, Monolithic and Hybrid Integrated Circuits, IC Fabrication	(1) S. M. Sze, "VLSI Technology", 2nd Edition, TMH. (2) S.K. Ghandhi, "VLSI Fabrication Principles", 2nd Edition, Willy-India Pvt.Ltd	April-2016